Controlled grain-size thermochromic VO2 coatings by the fast oxidation of sputtered vanadium or vanadium oxide films deposited at glancing angles

• Deposition of V or VOx GLAD films by combining and RGPP approaches. Fast post-deposition oxidation such systems in air to attain thermochromic VO 2 . High control grain size crystallinity adjusting reaction times. Comprehensive characterization SEM, Raman spectroscopy (S)TEM methods. Evaluation the MIT response means temperature dependant KPFM measurements. An original, simple cost-effective strategy vanadium dioxide thin is reported. This two-step procedure comprises initial deposition DC magnetron-sputtered oxide combination glancing angle and, if needed, reactive gas pulsing process, followed fast layers atmosphere at high temperatures. Thanks careful thermal treatment parameters, taking advantage superior reactivity surface-to-volume porous deposited structures, formation pure (M1) was achieved. The comprehensive oxidized scanning electron microscopy, scanning-transmission microscopy techniques as energy-loss spectroscopy, not only confirmed presence phase, but also allowed shed light on key role that time plays selective adjustable crystallinity. optimal conditions stabilize consists using large angles (85 °) short oxygen pulses (? s) during growth, treatments 45 s with a heating rate 42 °C ?1 ) 550 °C. metal-to-insulator accomplished finally evaluated dependent Kelvin probe force measurements, evidencing surface potential drops heating, greater than those reported literature date for films.